Illustrates several wide fov optical structure forms , the features of diffraction optics improving the performances of star sensor are demonstrated . a kind of hybrid optics of refraction and diffraction with a boe is studied in a test star sensor 對滿足大視場要求的幾種新型光學系統進行了分析對比;著重分析闡述了衍射光學系統特性對提高星敏感器性能的作用;對帶有二元光學元件的折衍混合光學系統在星敏感器中的應用進行了實驗研究。
The first section includes the theoretical and numerical analysis for diffractive optics elements and the second one gives the results of the fabrication experiments of diffractive optics elements . in the first section , we analyzed the antireflection of the diffraction optics elements . binary optics processing methods may be applied to a glass or silicon substrate to generate an array of small columns in order to enhance transmission 在理論分析的部分,本論文完成的主要工作是用耦合波理論分析了在玻璃或硅基底上制作具有亞波長結構的圓柱形網格陣列以實現對入射光的增透作用,為此而編寫的程序實際上也可以用來分析計算單位周期內具有任意面形的網格光柵的電磁場衍射特性。
Interferometirc lithographic technology incorporates laser , interference optics , diffraction optics and optical lithography and it is a frontier research subject in microfabrication technology and microelectronic field sponserd by national natural science foundation of china . the research for this technology in theory , simulation and experiments has important scientific meanings and broad application prospect for promoting lithographic limit , developing nanometer electronic and photoelectron devices , novel large screen panel display and novel lithographic equipment of our country 干涉光刻技術集激光、干涉和衍射光學及光學光刻于一體,是國家自然科學基金資助的微細加工技術和微電子領域的前沿研究課題,對其進行理論、模擬和實驗研究,對推進光學光刻極限,發展我國納米微電子和光電子器件、新型大屏幕平板顯示器和新型光刻機具有重要的科學意義和廣闊的應用前景。